An atomistic investigation on the wear of diamond during atomic force microscope tip-based nanomachining of gallium arsenide

نویسندگان

چکیده

This paper investigated the wear mechanism of diamond during atomic force microscope (AFM) tip-based nanomachining Gallium Arsenide (GaAs) using molecular dynamics (MD) simulations. The elastic–plastic deformation at apex tip was observed Meanwhile, a transition from its initial cubic lattice structure sp3 hybridization to graphite sp2 revealed. Graphitization was, therefore, found be dominant nanometric cutting single crystal gallium arsenide for first time. various stress states, such as hydrostatic stress, shear and von Mises within temperature distribution were also estimated find out underlying graphitization. results showed that heat GaAs would mainly lead graphitization instead high stress-induced transformation graphite. proposed new approach quantify conversion rate tip.

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ژورنال

عنوان ژورنال: Computational Materials Science

سال: 2021

ISSN: ['1879-0801', '0927-0256']

DOI: https://doi.org/10.1016/j.commatsci.2020.110115